Aosite, kubvira 1993
Iko kushandiswa kwemvura kunyudza scanning magirazi mu Ultrasound uye photoacoustic microscopy kwakaratidza kuve kunobatsira pakuongorora akatariswa matanda uye ultrasound matanda. Kuti uwedzere kuwedzera maitiro ekugadzira, nzira nyowani yakagadziridzwa inobvumira miniaturization uye kugadzirwa kwakawanda kwemagirazi aya. Iyo 3D multiphysics finite element modhi yakagadzirwawo kuti inyatso kutevedzera maitiro emagetsi ezvionioni, zvese zvakamira uye zvine simba. Maedzo ekuyedza uye maratidziro akabudirira kuvheneka kuita kwemvura inonyudzwa yekuongorora magirazi.
Muchidzidzo ichi, micromachined two-axis water immersion scanning mirror inoshandisa BoPET (biaxially oriented polyethylene terephthalate) Hinge yakaunzwa. Maitiro ekugadzira anosanganisira yakadzika plasma etching pane yakasanganiswa silicon-BoPET substrate, ichigonesa yakakwirira-resolution pateni uye vhoriyamu kugadzira kugona. Iyo prototype scanning girazi inogadzirwa uchishandisa nzira iyi inoyera 5x5x5 mm ^ 3, inofananidzwa neyakajairika silicon-based micro-scanning magirazi. Saizi yegirazi regirazi ndeye 4x4 mm^2, ichipa aperture hombe yekuona kana acoustic beam steering.
Resonance frequencies yeaxes inokurumidza uye inononoka inoyerwa kuita 420 Hz uye 190 Hz, zvichiteerana, kana ichishandiswa mumhepo. Nekudaro, kana yakanyudzwa mumvura, mafambiro aya anodzikira kusvika pa330 Hz uye 160 Hz, zvichiteerana. Makona ekurerekera egirazi rinotaridza anosiyana nemadhiraivha ekutyaira, achiratidza hukama hwemutsara nemakona anorerekera kusvika ± 3.5 ° kutenderedza mbezo inokurumidza uye inononoka. Nekuchaira panguva imwe chete ese ari maviri, yakagadzikana uye inodzokororwa raster scan mapatani inogona kuwanikwa munzvimbo dzese dzemhepo nemvura.
Iyo micromachined yekunyudza mvura yekuongorora magirazi inobata mukana wakakura weakasiyana ekutarisa optical uye acoustic microscopy application, zvese mumhepo uye mvura nharaunda. Iyi nzira nyowani yekugadzira uye dhizaini inopa inoshanda uye yakavimbika mhinduro, ichigadzira nzira yekufambira mberi muhunyanzvi hwekufungidzira.
Chokwadi, heino muenzaniso FAQ ye "Micromachined Immersion Scanning Mirror Uchishandisa BoPET Hinges":
1. Chii chinonzi micromachined immersion scanning mirror?
A micromachined immersion scanning girazi chinhu chidiki chinoshandiswa kutungamira uye kuongorora mwenje mumashandisirwo akasiyana siyana senge laser scanning, imaging yekurapa, uye kuratidza matekinoroji.
2. Chii chinonzi BoPET hinges?
Mahinji eBoPET (Biaxially-oriented polyethylene terephthalate) anochinjika, akasimba, uye akareruka mahinge ayo anowanzo shandiswa mukushandisa micromachining nekuda kweakanakisa ma mechanical properties.
3. Ndeapi mabhenefiti ekushandisa BoPET hinges mugirazi rekutarisa?
BoPET hinges inopa kuchinjika kwepamusoro, kusimba, uye kugadzirwa kwemutengo wakaderera, zvichiita kuti ive yakanakira kushandiswa mune micromachined scanning magirazi ekushandisa kwakasiyana.
4. Ko iyo micromachined immersion scanning mirror inoshanda sei?
Iyo micromachined immersion scanning mirror inoshandisa iyo BoPET hinges kugadzira inochinjika uye chaiyo yekuvheneka nzira inotungamira uye inovheneka chiedza nenzira inodzorwa.
5. Ndeapi angangove mashandisiro eiyo micromachined immersion scanning mirror?
Iyo micromachined immersion scanning mirror ine huwandu hwakasiyana hwezvishandiso zvinogona kusanganisira laser scanning, endoscopic imaging, optical coherence tomography, uye augmented real displays.