Igwe nyocha imimikpu Micromachined Iji BoPET Hinges

Iji enyo nyocha nke imikpu mmiri n'ime ultrasound na fotoacoustic microscopy egosila na ọ bara uru maka nyocha oghere lekwasịrị anya na oghere ultrasound. Iji mee ka usoro mmepụta ahụ dịkwuo elu, e mepụtala usoro ọhụrụ nke na-enye ohere maka obere ihe na mmepụta nke enyo ndị a. Emebekwara ihe nlere anya mmechi nke 3D multiphysics ka o wee megharịa omume eletrọnịkị nke enyo n'ụzọ ziri ezi, ma n'otu n'otu na nke ike. Nnwale nnwale na njirimara enyochala nke ọma arụmọrụ nyocha nke enyo nyocha imikpu mmiri.

N'ime ọmụmụ ihe a, a na-ewebata enyo nyocha mmiri na-emikpu mmiri nke abụọ-axis na-eji BoPET (biaxially oriented polyethylene terephthalate) Hinge. Usoro imepụta ihe na-agụnye etching plasma miri emi na ngwakọ silicon-BoPET, na-eme ka ụkpụrụ dị elu na ikike imepụta olu. Ngosipụta ihe nleba anya nke emepụtara site na iji usoro a na-atụ 5x5x5 mm^3, nke a na-atụnyere enyo nyocha micro-scanning nke silicon. Ogo efere enyo bụ 4x4 mm^2, na-enye oghere ka ukwuu maka ntugharị anya ma ọ bụ ụda ụda.

A na-atụ ugboro ugboro resonance nke anyụike ọsọ na ngwa ngwa ka ọ bụrụ 420 Hz na 190 Hz, n'otu n'otu, mgbe ejiri ya na ikuku. Agbanyeghị, mgbe etinyere ya na mmiri, ugboro ndị a na-agbada ruo 330 Hz na 160 Hz, n'otu n'otu. Akụkụ tilt nke enyo na-egosipụta na-adịgasị iche na mmiri mbanye, na-egosi mmekọrịta kwụ ọtọ na akụkụ tilt ruo ± 3.5° gburugburu axes ngwa ngwa na ngwa ngwa. Site n'otu oge ịnya anyụike abụọ, enwere ike nweta usoro nyocha nke raster kwụsiri ike na nke a na-emegharịgharị na mpaghara ikuku na mmiri.

Igwe nyocha nke imikpu mmiri nke micromachined na-ejide nnukwu ikike maka ọtụtụ ngwa nyocha anya na ngwa microscopy, ma na gburugburu ikuku na mmiri mmiri. Usoro mmepụta na nhazi ọhụrụ a na-enye ngwọta dị mma na nke a pụrụ ịdabere na ya, na-emeghe ụzọ maka ọganihu na teknụzụ onyonyo.

N'ezie, ebe a bụ ihe atụ FAQ maka "Micromachined immersion Scanning mirror Iji BoPET Hinges":
1. Kedu ihe bụ enyo nyocha immersion micromachied?
Igwe nyocha immersion micromachined bụ obere ngwaọrụ eji eduzi na nyocha ọkụ n'ime ngwa dị iche iche dị ka nyocha laser, onyonyo ahụike na teknụzụ ngosi.

2. Kedu ihe bụ hinges BoPET?
BoPET (Biaxially-oriented polyethylene terephthalate) hinges bụ ihe na-agbanwe agbanwe, siri ike, na nke dị fechaa nke a na-ejikarị na ngwa micromachining n'ihi ọmarịcha ọrụ ha.

3. Kedu uru dị na iji hinges BoPET na enyo nyocha?
Ihe mkpuchi BoPET na-enye mgbanwe dị elu, ịdịte aka na nrụpụta dị ọnụ ala, na-eme ka ha dị mma maka iji na enyo nyocha micromachined maka ngwa dị iche iche.

4. Kedu ka enyo nyocha immersion micromachined si arụ ọrụ?
Igwe nyocha immersion micromachined na-eji mgbanaka BoPET mepụta usoro nyocha na-agbanwe agbanwe na nke ziri ezi nke na-eduzi nke ọma ma na-enyocha ọkụ n'ụzọ a na-achịkwa.

5. Kedu ihe nwere ike ime nke enyo nyocha immersion micromachined?
Ngosipụta immersion nke micromachined nwere ọtụtụ ngwa nwere ike gụnyere nyocha laser, onyonyo endoscopic, tomography ngwa anya na-arụkọ ọrụ ọnụ na ngosipụta eziokwu.