Micromachined Immersion Scanning Daim iav siv BoPET Hinges

Kev siv dej immersion scanning tsom iav hauv ultrasound thiab photoacoustic microscopy tau ua pov thawj tias muaj txiaj ntsig zoo rau kev soj ntsuam cov teeb pom kev zoo thiab cov kab hluav taws xob ultrasound. Txhawm rau txhim kho cov txheej txheem fabrication, ib txoj hauv kev tshiab tau tsim los uas tso cai rau kev tsim cov iav me me thiab loj ntawm cov iav no. Tus qauv 3D multiphysics finite element qauv kuj tau tsim los kom raug simulate tus cwj pwm electromechanical ntawm daim iav, ob qho tib si statically thiab dynamically. Cov kev sim thiab cov yam ntxwv tau ua tiav qhov kev kuaj xyuas kev ua tau zoo ntawm cov dej immersion scanning tsom iav.

Hauv txoj kev tshawb no, micromachined ob-axis dej immersion scanning daim iav siv BoPET (biaxially oriented polyethylene terephthalate) Hinge tau qhia. Cov txheej txheem fabrication muaj kev sib sib zog nqus plasma etching ntawm hybrid silicon-BoPET substrate, ua kom muaj kev daws teeb meem siab thiab muaj peev xwm tsim khoom ntim. Daim iav qauv qauv tsim los siv qhov kev ntsuas no ntsuas 5x5x5 mm^3, uas yog piv rau cov silicon-based micro-scanning iav. Daim iav phaj loj yog 4x4 mm^2, muab lub aperture loj dua rau optical lossis acoustic beam steering.

Resonance zaus ntawm qhov ceev thiab qeeb axes yog ntsuas los ntawm 420 Hz thiab 190 Hz, feem, thaum ua haujlwm hauv huab cua. Txawm li cas los xij, thaum muab tso rau hauv dej, cov zaus no txo ​​qis mus rau 330 Hz thiab 160 Hz, feem. Lub kaum sab xis ntawm lub iav tsom iav sib txawv nrog cov tsav tam sim no, qhia txog kev sib raug zoo nrog lub kaum sab xis mus txog ± 3.5 ° nyob ib ncig ntawm lub nrawm thiab qeeb. Los ntawm ib txhij tsav tsheb ob axes, ruaj khov thiab rov ua dua raster scan qauv tuaj yeem ua tiav hauv huab cua thiab dej ib puag ncig.

Lub micromachined dej immersion scanning tsom iav tuav lub peev xwm loj heev rau ntau yam kev siv tshuaj ntsuam xyuas qhov muag thiab acoustic microscopy, ob qho tib si hauv huab cua thiab dej ib puag ncig. Cov txheej txheem tsim khoom tshiab thiab tsim qauv no muab cov kev daws teeb meem zoo thiab txhim khu kev qha, paving txoj hauv kev rau kev nce qib hauv kev yees duab yees.

Tseeb, ntawm no yog ib qho piv txwv FAQ rau "Micromachined Immersion Scanning Mirror Siv BoPET Hinges":
1. Dab tsi yog micromachined immersion scanning daim iav?
Lub micromachined immersion scanning daim iav yog ib qho khoom siv me me siv rau kev taw qhia thiab teeb pom kev hauv ntau yam kev siv xws li laser scanning, kev kho mob duab, thiab cov thev naus laus zis.

2. BoPET hinges yog dab tsi?
BoPET (Biaxially-oriented polyethylene terephthalate) hinges yog yoog raws, muaj zog, thiab cov khoom siv pob khawm sib sib zog nqus uas feem ntau siv hauv micromachining daim ntaub ntawv vim lawv cov khoom zoo heev.

3. Dab tsi yog qhov zoo ntawm kev siv BoPET hinges hauv daim iav scan?
BoPET hinges muab kev ua tau zoo dua qub, ua haujlwm ntev, thiab kev tsim cov nqi qis, ua rau lawv zoo tagnrho rau siv hauv micromachined scanning iav rau ntau yam kev siv.

4. Lub micromachined immersion scanning daim iav ua haujlwm li cas?
Lub micromachined immersion scanning daim iav siv BoPET hinges los tsim ib tug saj zawg zog thiab meej scanning mechanism uas zoo directs thiab scans lub teeb nyob rau hauv ib tug tswj.

5. Dab tsi yog cov kev siv ntawm micromachined immersion scanning daim iav?
Lub micromachined immersion scanning daim iav muaj ntau yam kev siv xws li laser scanning, endoscopic imaging, optical coherence tomography, thiab augmented reality displays.