Aosite, kuba 1993
Ukusetyenziswa kwezibuko zokuntywila emanzini kwi-ultrasound kunye ne-photoacoustic microscopy kungqineke kuluncedo ekuhloleni imiqadi egxininisiweyo kunye nemitha ye-ultrasound. Ukuphucula ngakumbi inkqubo yokuyila, kuye kwaphuhliswa indlela entsha evumela ukwenziwa kweminiaturization kunye nokuveliswa ngobuninzi bezi zipili. Imodeli ephelelisiweyo ye-3D ye-multiphysics nayo yenzelwe ukulinganisa ngokuchanekileyo indlela yokuziphatha ye-electromechanical yezibuko, zombini kunye ne-dynamically. Iimvavanyo zovavanyo kunye neempawu ziye zaqinisekisa ngempumelelo ukusebenza kokuskena kwezibuko zokuskena zokuntywiliselwa kwamanzi.
Kolu phononongo, i-micromachined i-micromachined two-axis water inmersion mirroring scanning mirror usebenzisa i-BoPET (i-biaxially oriented polyethylene terephthalate) i-Hinge iye yaziswa. Inkqubo yokuyila ibandakanya ukufakwa kwe-plasma enzulu kwi-silicon-BoPET substrate, eyenza ipateni yokulungiswa okuphezulu kunye nokukwazi ukwenza umthamo. Iprototype yokuskena isibuko esiveliswe ngokusebenzisa le ndlela yokulinganisa i-5x5x5 mm ^ 3, efaniswa nezibuko eziqhelekileyo ze-silicon-based micro-scanning. Ubungakanani bepleyiti yesibuko yi-4x4 mm^2, inika indawo enkulu yokuvula i-optical or acoustic beam steering.
Iifrikhwensi ze-resonance yee-axes ezikhawulezayo kunye nezicothayo zilinganiselwa kwi-420 Hz kunye ne-190 Hz, ngokulandelanayo, xa zisebenza emoyeni. Nangona kunjalo, xa untywiliselwa emanzini, ezi zihlandlo ziyancipha ukuya kwi-330 Hz kunye ne-160 Hz, ngokulandelanayo. Ii-engile ezithambekileyo zesibuko esibonakalisayo ziyahluka ngokwemisinga yokuqhuba, ebonisa unxulumano olunomgca onama-engile wokuthambeka ukuya kuthi ga kwi-±3.5° ukujikeleza i-axes ekhawulezayo necothayo. Ngokuqhuba ngaxeshanye zombini izembe, iipateni ezizinzileyo neziphindaphindwayo ze-raster scan zinokufikelelwa kuzo zombini iindawo zomoya kunye namanzi.
Izibuko zokuskena zokuntywiliselwa emanzini ezinemicromachine zibambe amandla amakhulu oluhlu olubanzi lokuskena usetyenziso lwe-optical kunye ne-acoustic microscopy, zombini emoyeni kunye nemeko yolwelo. Le nkqubo entsha yokwenziwa kunye noyilo ibonelela ngezisombululo ezisebenzayo nezithembekileyo, zivula indlela yokuqhubela phambili kubuchwepheshe bomfanekiso.
Ngokuqinisekileyo, nantsi isampula ye-FAQ ye "Micromachined Immersion Scanning Mirror Usebenzisa i-BOPET Hinges":
1. Yintoni isipili sokuntywila esincinci?
Isibuko sokuntywila se-micromachined sisixhobo esincinci esisetyenziselwa ukwalathisa kunye nokuskena ukukhanya kwiinkqubo ezahlukeneyo ezifana ne-laser scanning, i-imaging yezonyango, kunye nokubonisa itekhnoloji.
2. Ziziphi iihenjisi ze-BOPET?
Iihenjisi ze-BoPET (i-Biaxially-oriented polyethylene terephthalate) ziguquguqukayo, zinamandla, kwaye zikhaphukhaphu izixhobo zehinge ezisetyenziswa ngokuqhelekileyo kwizicelo ze-micromachining ngenxa yeempawu zazo ezibalaseleyo.
3. Zeziphi iingenelo zokusebenzisa iihenjisi ze-BOPET kwisipili sokuskena?
Iihenjisi ze-BOPET zibonelela ngokuguquguquka okuphezulu, ukuqina, kunye nokuveliswa kwexabiso eliphantsi, okuzenza zilungele ukusetyenziswa kwizibuko zokuskena ezine-micromachined kwizicelo ezahlukeneyo.
4. Sisebenza njani isipili sokuntywila semicromachined?
Isibuko sokuntywila se-micromachined sisebenzisa iihenjisi ze-BoPET ukwenza i-flexible nechanekileyo indlela yokuskena elawula ngokufanelekileyo kwaye ihlola ukukhanya ngendlela elawulwayo.
5. Zeziphi izicelo ezinokubakho zesipili sokuntywiliselwa esincinci?
Isibuko sokuntywila se-micromachined sinoluhlu olubanzi lwezicelo ezinokuthi zifakwe kwi-laser scanning, i-endoscopic imaging, i-optical coherence tomography, kunye nemiboniso yokwenyani eyandisiweyo.