Aosite, kusukela 1993
Ukusetshenziswa kwezibuko zokuskena zokucwiliswa emanzini ku-ultrasound kanye ne-photoacoustic microscopy kufakazele ukuthi kunenzuzo ukuskena imishayo egxilile kanye nemishayo ye-ultrasound. Ukuze kuthuthukiswe inqubo yokwenziwa, kuye kwasungulwa indlela entsha evumela ukwenziwa kwezinto ezincane kanye nokukhiqizwa ngobuningi kwalezi zibuko. Imodeli yesici esinqunyelwe se-3D ye-multiphysics nayo idalwe ukuze ilingise ngokunembile ukuziphatha kwe-electromechanical kwezibuko, kokubili ngokwezibalo nangokuguqukayo. Ukuhlolwa kokuhlola nezimpawu kuqinisekise ngempumelelo ukusebenza kokuskena kwezibuko zokuskena zokucwiliswa emanzini.
Kulolu cwaningo, isibuko sokuskena sokucwiliswa kwamanzi esinama-axis amabili esine-micromachined sisebenzisa i-BoPET (i-biaxially oriented polyethylene terephthalate) kwethulwe i-Hinge. Inqubo yokwenza izinto ihlanganisa ukujula kwe-plasma ku-hybrid silicon-BoPET substrate, okuvumela ukwenza iphethini yokulungiswa okuphezulu kanye nekhono lokukhiqiza ivolumu. Isibuko sokuskena se-prototype esikhiqizwe kusetshenziswa le ndlela sikala u-5x5x5 mm^3, esiqhathaniseka nezibuko ezijwayelekile ezisekelwe ku-silicon. Usayizi wepuleti lesibuko ngu-4x4 mm^2, uhlinzeka ngokuvula indawo enkulu yesiteringi se-optical noma i-acoustic beam.
Amafrikhwensi eresonance yama-eksisi asheshayo futhi ahamba kancane akalwa ukuze abe ngu-420 Hz no-190 Hz, ngokulandelana, lapho esebenza emoyeni. Kodwa-ke, uma ucwiliswa emanzini, lawa mafrikhwensi ancipha aze afike ku-330 Hz no-160 Hz, ngokulandelana. Ama-engeli atshekile esibuko esikhanyayo ayahlukahluka ngamaza okushayela, abonisa ubudlelwano bomugqa nama-engeli anyakazayo afika ku-±3.5° azungeze ama-eksisi asheshayo nanensayo. Ngokushayela kanyekanye izimbazo zombili, amaphethini we-raster scan azinzile futhi aphindaphindwayo angafinyelelwa kuzo zombili izindawo zomoya nezamanzi.
Izibuko zokuskena zokucwiliswa emanzini ezinemishini emincane zibambe amandla amakhulu ohlu olubanzi lwezinhlelo zokusebenza zemicroscopy ye-optical ne-acoustic, kokubili emoyeni nasezimweni eziwuketshezi. Le nqubo entsha yokwenziwa kanye nomklamo kunikeza izixazululo eziphumelelayo nezithembekile, okuvula indlela yentuthuko kubuchwepheshe bezithombe.
Impela, nali isampula le-FAQ le-"Micromachined Immersion Scanning Mirror Usebenzisa amahinge e-BoPET":
1. Siyini isibuko sokucwiliswa esisetshenzwa ngemishini emincane?
Isibuko sokuskena sokucwiliswa ngomshini omncane siyidivayisi encane esetshenziselwa ukuqondisa nokuskena ukukhanya ezinhlelweni ezihlukahlukene ezifana ne-laser scanning, imaging medical, kanye nobuchwepheshe bokubonisa.
2. Ayini amahinge e-BoPET?
Amahinge e-BoPET (Biaxially-oriented polyethylene terephthalate) ayakwazi ukuguquguquka, aqinile, futhi angasindi izinto ezisetshenziswayo ezisetshenziswa kakhulu ekusetshenzisweni kwe-micromachining ngenxa yezakhiwo zazo ezinhle kakhulu zemishini.
3. Yiziphi izinzuzo zokusebenzisa amahinge e-BoPET esibukweni sokuskena?
Amahinge e-BoPET anikeza ukuguquguquka okuphakeme, ukuqina, nokukhiqiza okunezindleko eziphansi, okuwenza alungele ukusetshenziswa ezibukweni zokuskena ezinemishini emincane yezinhlelo zokusebenza ezahlukahlukene.
4. Sisebenza kanjani isibuko sokucwilisa esisetshenzwa ngemishini emincane?
Isibuko sokuskena sokucwiliswa ngemishini emincane sisebenzisa amahinge e-BoPET ukuze sakhe indlela yokuskena eguquguqukayo nenembayo eqondisa kahle futhi iskena ukukhanya ngendlela elawulwayo.
5. Yiziphi izinhlelo zokusebenza ezingase zibe khona zesibuko sokucwilisa esicwiliswe ngemishini emincane?
Isibuko sokuskena sokucwiliswa esinama-micromachined sinezinhlobonhlobo zezinhlelo zokusebenza ezingase zibe khona ezihlanganisa ukuskena nge-laser, imaging ye-endoscopic, i-optical coherence tomography, nezibonisi zangempela ezingeziwe.