Aosite, daga baya 1993
Yin amfani da madubin binciken nutsewar ruwa a cikin duban dan tayi da na'urar daukar hoto na hoto ya tabbatar da cewa yana da fa'ida don bincika bishiyar da aka mayar da hankali da kuma bim na duban dan tayi. Don ƙara haɓaka aikin ƙirƙira, an ƙirƙiri sabuwar hanyar da ke ba da izinin ƙaranci da yawan samar da waɗannan madubai. Hakanan an ƙirƙiri samfurin 3D mai ƙayyadaddun ƙayyadaddun ƙayyadaddun abubuwa don daidaita daidaitaccen halayen injin lantarki na madubai, duka a tsaye da kuma a zahiri. Gwaje-gwaje na gwaji da sifofi sun yi nasarar tabbatar da aikin duban madubin duban nutsewar ruwa.
A cikin wannan binciken, an gabatar da madubin duban ruwa mai axis biyu na micromachined ta amfani da BoPET (biasxially oriented polyethylene terephthalate) Hinge. Tsarin ƙirƙira ya haɗa da etching mai zurfi na plasma akan ƙaramin siliki-BoPET, yana ba da damar ƙirar ƙira mai ƙima da ƙarfin masana'anta. Madubin binciken samfurin samfurin da aka samar ta amfani da wannan tsarin yana auna 5x5x5 mm^3, wanda yayi daidai da madaidaicin madubin binciken micro-scanning na tushen silicon. Girman farantin madubi shine 4x4 mm^2, yana ba da mafi girman buɗe ido don tuƙi ko ƙararrawa.
Ana auna mitocin ƙarar gatura masu sauri da jinkirin zuwa 420 Hz da 190 Hz, bi da bi, lokacin da ake sarrafa su cikin iska. Koyaya, lokacin nutsewa cikin ruwa, waɗannan mitoci suna raguwa zuwa 330 Hz da 160 Hz, bi da bi. Kusurwoyin karkatar da madubin nuni sun bambanta tare da igiyoyin tuƙi, suna nuna alaƙar madaidaiciya tare da kusurwoyin karkatar har zuwa ± 3.5° kewaye da gatura mai sauri da jinkirin. Ta hanyar tukin gatura a lokaci guda, za'a iya samun barga da kuma maimaita tsarin duban raster a cikin yanayi na iska da na ruwa.
Madubin binciken nutsewar ruwa na micromachined yana riƙe da babban yuwuwar don aikace-aikacen duban gani da gani da sauti, duka a cikin mahalli na iska da ruwa. Wannan sabon tsari na ƙirƙira da ƙira yana ba da ingantacciyar mafita kuma abin dogaro, yana buɗe hanya don ci gaba a cikin fasahar hoto.
Tabbas, ga samfurin FAQ na "Micromachined Immersion Scanning Mirror Amfani da BoPET Hinges":
1. Menene madubin duban nutsewar micromachined?
Madubin binciken nutsewar micromachied ƙaramar na'ura ce da ake amfani da ita don jagora da duba haske a aikace-aikace daban-daban kamar na'urar daukar hoto ta Laser, hoton likitanci, da fasahar nuni.
2. Menene hinges na BoPET?
BoPET (Biaxially-daidaitacce polyethylene terephthalate) hinges suna sassauƙa, ƙarfi, da kayan hinge masu nauyi waɗanda galibi ana amfani da su a aikace-aikacen micromachining saboda kyawawan kaddarorin injin su.
3. Menene fa'idodin amfani da hinges na BoPET a cikin madubin dubawa?
Hanyoyi na BoPET suna ba da ingantaccen sassauci, ɗorewa, da masana'anta masu rahusa, yana mai da su manufa don amfani da su a cikin madubin dubawa na micromachined don aikace-aikace daban-daban.
4. Yaya micromachined immersion duban madubin ke aiki?
Madubin dubawar nutsewar micromachined yana amfani da hinges na BoPET don ƙirƙirar sassauƙa da daidaitaccen tsarin dubawa wanda ya dace da jagora da duba haske ta hanyar sarrafawa.
5. Menene yuwuwar aikace-aikace na madubin duban nutsewar micromachied?
Madubin immersion na micromachined yana da fa'idodi da yawa na yuwuwar aikace-aikace da suka haɗa da sikanin Laser, hoton endoscopic, hoton haɗin kai na gani, da ƙarin nunin gaskiya.